United Nations Educational, Scientific and Cultural Organization and International Atomic Energy Agency THE ABDUS SALAM INTERNATIONAL CENTRE FOR THEORETICAL PHYSICS MODELLING AND DYNAMICS OF A SELF-SUSTAINED ELECTROSTATIC MICRO ELECTRO MECHANICAL SYSTEM
نویسنده
چکیده
This paper deals with the study of a model of self-sustained electrostatic micro Electromechanical system (MEMS). The electrical part contains two nonlinear components: a nonlinear resistance with a negative slope in the current-voltage characteristics and a capacitor having a cubic form as the charge-voltage characteristics. The modal approximation and the finite differences numerical scheme are used to analyze the dynamical behavior of the system: resonant oscillations and bifurcation diagram leading to chaos are observed for some values of the polarization voltage. Hints of applications of the device are given. MIRAMARE – TRIESTE June 2009 Corresponding author: [email protected]
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تاریخ انتشار 2009